JPH0438246Y2 - - Google Patents
Info
- Publication number
- JPH0438246Y2 JPH0438246Y2 JP5403687U JP5403687U JPH0438246Y2 JP H0438246 Y2 JPH0438246 Y2 JP H0438246Y2 JP 5403687 U JP5403687 U JP 5403687U JP 5403687 U JP5403687 U JP 5403687U JP H0438246 Y2 JPH0438246 Y2 JP H0438246Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- monochromator
- measuring device
- reflected
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5403687U JPH0438246Y2 (en]) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5403687U JPH0438246Y2 (en]) | 1987-04-09 | 1987-04-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63161307U JPS63161307U (en]) | 1988-10-21 |
| JPH0438246Y2 true JPH0438246Y2 (en]) | 1992-09-08 |
Family
ID=30880653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5403687U Expired JPH0438246Y2 (en]) | 1987-04-09 | 1987-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438246Y2 (en]) |
-
1987
- 1987-04-09 JP JP5403687U patent/JPH0438246Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63161307U (en]) | 1988-10-21 |
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